TechXPOT NOrth logo

 

Addressing Nanodefectivity

 

Wednesday, July 10, 2013
10:30am
12:30pm
North Hall, Moscone Center

 
 
 

Session Partner:  Session Sponsor:  

 

As device dimensions decrease to less than 20 nm nodes, critical defect size also moves into the nanoscale. The technical challenges of finding, identifying, and removing defects at the nanoscale require new infrastructure investments. In this session, the challenges of new inspection and characterization equipment are coupled to fundamentals of defect generation at the nanoscale to describe the integrated nanodefect problem and solutions to enable future semiconductor industry yield enablement.

 

10:30am-10:50am       
    

Coupling e-beam Review with Defect Discovery for
Rapid Defect Sourcing

(Presentation in PDF)


Paul MacDonald (Biography)
Senior Director of Marketing and Applications
e-Beam Technology Division
KLA-Tencor

 
10:50am-11:10am

Vacuum Systems and a Low Particle Footprint
(Presentation in PDF)


Sia Abbaszadeh (Biography)

Chief Technology & Marketing Officer

Edwards Vacuum
 
11:10am-11:30am Characterizing Vacuum Valves for sub-20 nm
Nodes
VAT Valves

(Presentation in PDF)

Thomas Christen (Biography)

Global Product Manager
VAT Vacuumvalves AG
 
11:30am-11:50am

A Design Guideline for Zero Defect Process Tools
(Presentation in PDF)


Song-Moon Suh, Ph.D. (Biography)

Senior Member of Technical Staff

Applied Materials

 
11:50am-12:10pm

Challenges of Nanodefectivity
(Presentation in PDF)


Abbas Rastegar, Ph.D. (Biography)
Fellow
SEMATECH

 
12:10pm-12:30pm  
Towards Zero Defects in Handling

(Presentation in PDF)

 

Norbert Koster (Biography)
Principal Scientist

TNO

 Session Moderator:
Michael Lercel (Biography)
Senior Director of Nanodefectivity and Metrology
SEMATECH

 

 

Please check back frequently for updates and more information as agendas develop and speakers are announced.

 


View Schedule of Events

 

 

How to Register for this Program

 

 

I'm Already Registered for SEMICON West

I Have Not Registered for SEMICON West



Login to the Registration Resource Center and select “Agenda Builder” to add this program. Begin a new registration form and select this program and any others you wish to attend during Step 2.
Bookmark and Share