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Addressing Nanodefectivity


Wednesday, July 10, 2013
North Hall, Moscone Center


Session Partner:  Session Sponsor:  


As device dimensions decrease to less than 20 nm nodes, critical defect size also moves into the nanoscale. The technical challenges of finding, identifying, and removing defects at the nanoscale require new infrastructure investments. In this session, the challenges of new inspection and characterization equipment are coupled to fundamentals of defect generation at the nanoscale to describe the integrated nanodefect problem and solutions to enable future semiconductor industry yield enablement.



Coupling e-beam Review with Defect Discovery for
Rapid Defect Sourcing

(Presentation in PDF)

Paul MacDonald (Biography)
Senior Director of Marketing and Applications
e-Beam Technology Division


Vacuum Systems and a Low Particle Footprint
(Presentation in PDF)

Sia Abbaszadeh (Biography)

Chief Technology & Marketing Officer

Edwards Vacuum
11:10am-11:30am Characterizing Vacuum Valves for sub-20 nm
VAT Valves

(Presentation in PDF)

Thomas Christen (Biography)

Global Product Manager
VAT Vacuumvalves AG

A Design Guideline for Zero Defect Process Tools
(Presentation in PDF)

Song-Moon Suh, Ph.D. (Biography)

Senior Member of Technical Staff

Applied Materials


Challenges of Nanodefectivity
(Presentation in PDF)

Abbas Rastegar, Ph.D. (Biography)

Towards Zero Defects in Handling

(Presentation in PDF)


Norbert Koster (Biography)
Principal Scientist


 Session Moderator:
Michael Lercel (Biography)
Senior Director of Nanodefectivity and Metrology



Please check back frequently for updates and more information as agendas develop and speakers are announced.


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