Whether you are involved in designing and implementing leading-edge 450mm and 20nm tools, or looking for cutting-edge productivity solutions for existing fabs, SEMICON West features the latest innovations, products, trends and solutions.

Critical technology issues on display and in discussion include—New Device Architectures: FinFETs/veritical/multi-gate transistors, high-k metal gates; Advanced Lithography: Immersion, double-patterning, EUV, e-beam, imprint, source/mask optimization-SMO; EUV Technologies: Laser produced plasma (LPP), discharge produced plasma (DPP); Atomic Layer Deposition (ALD); GaN and other III-V/Compound Semiconductors; Nano Defect Detection and Metrology; Advanced Components and Subsystems.